Measurement Range:0 to 500 SCCM
Accuracy:±1% of reading
Repeatability:≤ ±0.5% of span
Response Time:Less than 1 second
Operating Temperature:-10°C to +50°C
Power Supply:12V DC ±10%
Control Protocol:RS-232, RS-485, Modbus
Material:Stainless Steel and Glass
Size:250mm x 150mm x 100mm
Precision engineered for semiconductor applications, the LINTEC MC-3000E/3102E-NC Mass Flow Controller offers unparalleled accuracy and reliability, essential for achieving consistent yield in high-volume production.
Featuring an innovative temperature compensation system, this controller maintains stable flow rates across a wide range of ambient temperatures, ensuring optimal performance regardless of environmental conditions.
With its compact design, the LINTEC MC series seamlessly integrates into existing systems without compromising on functionality or space constraints, facilitating streamlined operations in semiconductor fabs.
Equipped with advanced communication protocols, including RS-232/485 and analog outputs, this mass flow controller allows for seamless data exchange and compatibility with various automation systems, enhancing process efficiency and control.
Backed by LINTEC’s commitment to quality and customer service, the MC-3000E/3102E-NC N2 500 SCCM Mass Flow Controller comes with comprehensive support and a warranty, ensuring peace of mind for users seeking top-tier precision in their manufacturing processes.
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