LAM 810-069751-114 High Precision Industrial Control Module

In stock

The Lam Research 810-069751-114 is a high-precision semiconductor process module designed for advanced manufacturing applications. It offers superior performance and reliability, ensuring optimal results in critical semiconductor fabrication processes.

Part Number:810-069751-114

Brand:Lam Research

Module Type:Plasma Etch Module

Voltage Rating:240V

Frequency Range:50/60 Hz

Chamber Size:300mm

Process Gas Types:Cl2, O2, NF3

Etch Rate:100nm/min

Chuck Temperature Range:-5°C to 80°C

Power Output:1500W

Control Interface:Touchscreen

Communication Protocol:Ethernet/IP, Modbus TCP

Certifications:CE, UL, SEMI S2

The LAM 810-069751-114 is engineered to deliver unparalleled precision in industrial control systems.

Its robust design and high-performance capabilities make it suitable for demanding environments.

The module supports multiple communication protocols, ensuring seamless integration with existing systems.

With an operating voltage of 24V DC and a wide range of control inputs and outputs, it provides flexibility for various applications.

The IP67 rating ensures protection against dust and water ingress, making it ideal for harsh industrial settings.

Designed with reliability and durability in mind, the LAM 810-069751-114 is a trusted solution for manufacturers seeking top-tier control and monitoring capabilities.

LAM 810-069751-114